Graphite boat and parts

Graphite boats possess excellent high-temperature resistance, chemical stability, electrical conductivity, and low thermal expansion coefficient. They are used to carry and transport silicon wafers inside high-temperature furnace tubes, ensuring uniform heating of the silicon wafer surface and preventing contamination. At the same time, they are the result of a complex process combining precise design, high-technology machining, and strict quality control, aiming to meet the requirements of the semiconductor and photovoltaic industries for high-quality and high-performance carrying tools.

Description

Item Unit Data
Bulk density g/m3 1.82
Flexural strength Mpa 58
Electrical resistivity μΩm 11-13
Coefficient of thermal expansion
(Room temperature -600)
x10-6/°C 5.9
Shore hardness HSD 65
Compressive strength Mpa 127
modulus Gpa 12
Ash PPM 500
graininess µ m 8-10